A new technical paper titled “Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry” was published by researchers at IMEC and KU Leuven. ...
A Rutherford backscattering spectrometer (RBS) system can be applied to the study of surface coatings. The technique permits the study of inhomogeneous surface layers, including a determination of the ...
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